FIB-SEM with simultaneous milling and EBSD. The intrument allows preparation of high-quality ultra-thin TEM lamellae, delayering processes in technology nodes, precise nanopatterning and high-resolution 3D reconstructions.
UNIT
CNR ICCOM
Category
Key instrumentation Electron Microscope / Scanning Probe Microscope
FIB-SEM with simultaneous milling and EBSD. The intrument allows preparation of high-quality ultra-thin TEM lamellae, delayering processes in technology nodes, precise nanopatterning and high-resolution 3D reconstructions.