SEM-AFM with Optical Profiler
General information
Category
Scanning Electron Microscope system with EDS and colocalized AFM under SEM observation. It has a tungsten filament source and a unique four-lens Wide Field Optics column. It is endowed with a giant vacuum chamber which can host large samples and, beyond the mentioned AFM and a low vacuum and water vapor detector, a variety of ancillary equipment. These include Optical Profiler, nanomanipulation facilities, piezo micro-dynamometer, access for electronic signals. It will also be endowed with a separate STM instrument.
Technical description
Research areas and applications
Fundamental Materials Research, Quality control and failure analysis, Technical Cleanliness, Forensics, Catalysis Research, Materials Testing (energy storage, automotive, etc).
Characterization of composite materials, solar cells and interfaces in medicine, LAB on Chip, MEMS e MicroFluidica, prosthetics, energy, robotics and microelectronics (3D metrology and in semiconductors). Topography and spectroscopic characterization of surfaces and
interfaces of polymers, cultural heritage.
Science highlights
Experimental team
- Giovanni Romanelli
- NAST Centre - University of Rome Tor Vergata
- Researcher
- Anna Prioriello
- NAST Centre - University of Rome Tor Vergata
- PostDoc