SEM&C-AFM with Optical Profiler
General information
Category
Scanning Electron Microscope system with EDS and colocalised AFM (SEM&C-AFM) under SEM observation. It has a tungsten filament source and a unique four-lens Wide Field OpticsTM column. It is endowed with a giant vacuum chamber that can host large samples and, beyond the mentioned AFM and a low vacuum and water vapor detector, a variety of ancillary equipment. These include nanomanipulation facilities, piezo microdynamometers, and access to electronic signals. It will also soon be endowed with a separate STM instrument.
The Optical Profiler – optical profiling microscope (Z20 by ZETA Instruments) – is an ancillary equipment that can be used for optical profiling of any type of surface and light signal. It provides 3D metrology and imaging capability in a compact, robust package, which simultaneously collects high-resolution 3D data and a True Color infinite focus image.
Technical description
Research areas and applications
Fundamental Materials Research, Quality control and failure analysis, Technical Cleanliness, Forensics, Catalysis Research, Materials Testing (energy storage, automotive, etc).
Characterization of composite materials, solar cells and interfaces in medicine, LAB on Chip, MEMS e MicroFluidica, prosthetics, energy, robotics and microelectronics (3D metrology and in semiconductors). Topography and spectroscopic characterization of surfaces and
interfaces of polymers, cultural heritage.
Science highlights
Experimental team
- Giovanni Romanelli
- NAST Centre - University of Rome Tor Vergata
- Researcher
- Laura Fazi
- NAST Centre - University of Rome Tor Vergata
- PostDoc
- Anna Prioriello
- NAST Centre - University of Rome Tor Vergata
- PostDoc