SEM with correlative AFM

The TESCAN VEGA SEM is equipped with various types of detectors: X-ray for EDS microanalysis (Oxford Instruments INCA 200), back-scattering (BSE), Everhart-Thornley and In-lens Secondary Electron (SE) detectors, plus a water vapour detector for low vacuum. EDS microanalysis allow identification of elemental distribution of sub-micrometre areas of the specimens. The large vacuum vessel (340 x 315 x 320 mm3) allows the insertion of large samples. The electron gun consists of a Schottky Field Emission Gun. SEM parameters: a high tension range from 3 keV to 30 keV, a beam current from 10 pA to 100 nA and a wide magnification range going from 500X to 10 000X. The focussing of lens allows high-resolution images on conducting samples; for non-conducting samples the microscope operation is available either in high or low vacuum (with a partial pressure from 7 up to 500 Pa in nitrogen and water vapour. There is also the possibility to perform sputter coating with gold using the Quorum sputter coater, in order to avoid loading of non-conducting samples. Unique feature of this instrument is the presence of a SPM, particularly an AFM Microscope, useful for colocalized scanning-electron and nano-probe microscopy characterization. The AFSEM system enables to combine the possibilities of a Scanning Electron Microscope (SEM) with the capabilities of an atomic force microscopy (AFM). The AFM system can be inserted inside the SEM chamber for AFM surface measurements during SEM operation.

Fundamental Materials Research, Quality control and failure analysis, Technical Cleanliness, Forensics, Catalysis Research, Materials Testing (energy storage, automotive, etc). Characterization of composite materials and interfaces in medicine, cultural heritage, prosthetics, robotics and microelectronics. Topography and spectroscopic characterization of surfaces and interfaces of polymers, semiconductors, composite materials, with application also in cultural heritage.