TEM FEI

TEM FEI

Transmission Electron Microscope with LaB6 source (120 kV) and BF detector and FEI Eagle 4k CCD camera (bottom mounted).
SEM-AFM with Optical Profiler

SEM-AFM with Optical Profiler

SEM system with EDS-SPM, Correlative AFM during SEM. The instrument has conventional tungsten filament, equipped with modern electron optics based on a unique four-lens Wide Field OpticsTM column. The SEM is equipped with four types of detectors (EDS, BSE, SE).